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nanoFAB Equipment
Standard Operating Procedures (SOP)
Page Information
Title:
Standard Operating Procedures (SOP)
Author:
Michael Hume
Aug 21, 2019
Last Changed by:
Adam Pettigrew
Oct 27, 2020
Tiny Link:
(useful for email)
https://confluence.nanofab.ualberta.ca/x/hIAAAQ
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Equipment (71)
Page:
JEOL JEM ARM-200 TEM SOP & HA Listing
Page:
Sputtering System #4 Moe SOP & HA Listing
Page:
Wet Deck 1C SOP & HA Listing
Page:
Bruker XRD D8 SOP & HA Listing
Page:
Hitachi S-4800 SOP & HA Listing
Page:
Wet Deck 2C SOP & HA Listing
Page:
PHI 5000 VersaProbe XPS SOP & HA Listing
Page:
IBSS Contamination Control System SOP & HA Listing
Page:
memsstar VHF Etcher SOP & HA Listing
Page:
Trion RIE SOP & HA Listing
Page:
Disco 3240 Dicing Saw SOP & HA Listing
Page:
Litho Wet Deck #1 SOP & HA Listing
Page:
Trion PECVD SOP & HA Listing
Page:
Zeiss Xradia XRM SOP & HA Listing
Page:
KLA ASIQ - Characterization SOP & HA Listing
Page:
Hydra DualBeam SEM SOP & HA Listing
Page:
Rigaku XRD Ultima IV SOP & HA Listing
Page:
SUSS CBL6 Bonder SOP & HA Listing
Page:
YES HMDS Oven SOP & HA Listing
Page:
Renishaw inVia Raman Microscope SOP & HA Listing
Page:
SUSS MA6BA6 Mask Aligner SOP & HA Listing
Page:
Leica INM-100 #1 SOP & HA Listing
Page:
Sitek SemiTool 840-S SOP & HA Listing
Page:
Dymax Bluewave 200 SOP & HA Listing
Page:
KJLC 150LX ALD SOP & HA Listing
Page:
Nanoscribe Professional GT 2PP SOP & HA Listing
Page:
ABM Mask Aligner(Grover) SOP & HA Listing
Page:
Wet Deck 2A SOP & HA Listing
Page:
Oxford NGP80 RIE SOP & HA Listing
Page:
VASE VB-400 Ellipsometer SOP & HA Listing
Page:
Oxford Cobra ICPRIE SOP & HA Listing
Page:
Parylene Deposition SOP & HA Listing
Page:
PVD-75 SOP & HA Listing
Page:
KLA ASIQ - Cleanroom SOP & HA Listing
Page:
Filmetrics F50-UV SOP & HA Listing
Page:
Nikon Eclipse L200N SOP & HA Listing
Page:
Critical Point Dryer SOP & HA Listing
Page:
TPT HB16 Wire Bonder SOP & HA Listing
Page:
Brewer 200X SOP & HA Listing
Page:
Sitek SemiTool 870-S SOP & HA Listing
Page:
Disco 3241 Dicing Saw SOP & HA Listing
Page:
Wet Deck 2B SOP & HA Listing
Page:
KJLC CMS-18 (Doug) SOP & HA Listing
Page:
GLAD - Achilles SOP & HA Listing
Page:
RAITH150 Two SOP & HA Listing
Page:
Heidelberg MLA150 SOP & HA Listing
Page:
Wet Deck 1A SOP & HA Listing
Page:
Oxford Estrelas ICPRIE SOP & HA Listing
Page:
Tystar Furnaces SOP & HA Listing
Page:
Gomez SOP & HA Listing
Page:
Brewer 1300X SOP & HA Listing
Page:
Leica EM ACE600 SOP & HA Listing
Page:
ABM UV Flood Exposure SOP & HA Listing
Page:
Plasma-Therm PECVD SOP & HA Listing
Page:
Autosorb IQ SOP & HA Listing
Page:
KJLC CMS-18 (Bob) SOP & HA Listing
Page:
Fluxim Paios Spectrometer SOP & HA Listing
Page:
Litho Wet Deck #2 SOP & HA Listing
Page:
Toho FLX-2320-S SOP & HA Listing
Page:
Servo Precision Drill Press SOP & HA Listing
Page:
Zeiss EVO MA10 SOP & HA Listing
Page:
Angstrom Thermal Evaporator SOP & HA Listing
Page:
Wet Deck 1B SOP & HA Listing
Page:
Leica RES102 SOP & HA Listing
Page:
Zeiss Sigma FESEM SOP & HA Listing
Page:
KJLC CMS-18 (Floyd) SOP & HA Listing
Page:
JA Woollam M-2000 Ellipsometer SOP & HA Listing
Page:
Alcatel AMS110 SOP & HA Listing
Page:
Allwin AW610 RTA SOP & HA Listing
Page:
XRF Elemental Analyzer SOP & HA Listing
Page:
Zeiss Orion HeION SOP & HA Listing
nanoFAB Knowledge Base (1)
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Home page:
nanoFAB Equipment
Children (95)
Page:
ABM Mask Aligner - Bert - SOP
Page:
ABM Mask Aligner - Grover - SOP
Page:
ABM UV Flood Exposure System - Sunny - SOP
Page:
Alcatel AMS110 ICPRIE SOP
Page:
Allwin AW610 RTA SOP
Page:
Aluminum etching SOP
Page:
AML - AWB-04 Wafer Aligner + Bonder SOP
Page:
Atomic Force Microscope (Dimension Edge) SOP
Page:
Autosorb iQ SOP
Page:
Autosorb Quantachrome 1MP SOP
Show all...
Page:
Bob Sputtering System SOP
Page:
Branson Barrel Etcher SOP
Page:
Brewer Spinner and Hotplate SOP
Page:
Bruker XRD D8 Discover SOP
Page:
Chrome etching SOP
Page:
Cold Plate (Stir-Kool Sk-12D) SOP
Page:
Contact Angle FTA-200 SOP
Page:
Critical Point Drier SOP
Page:
Denton Sputtering System SOP (For SEM Imaging)
Page:
Disco DAD 3240 Dicing Saw SOP
Page:
Disco DAD 3241 Dicing Saw SOP
Page:
Doug Sputter System SOP
Page:
Dragonfly Software Offline Process SOP
Page:
Dump Rinse Controller Standard Program
Page:
Dymax BlueWave 200 SOP
Page:
Filmetrics F50-UV SOP
Page:
Floyd Sputtering System SOP
Page:
Four-Point Probe (Pro4 4000) SOP
Page:
Freeze Dryer SOP
Page:
FTIR (is-50) SOP
Page:
GLAD System (Achilles) SOP
Page:
Gold etching SOP
Page:
Gomez E-Beam Evaporation System SOP
Page:
Headway Resist Spinner SOP
Page:
Heidelberg MLA150 SOP
Page:
HF etching SOP
Page:
Hitachi S-4800 FESEM SOP
Page:
IBSS Contamination Control System SOP
Page:
Interfacial Tension SOP
Page:
J.A. Woollam VASE Ellipsometer SOP
Page:
JEOL ARM SOP
Page:
KJLC 150LX ALD SOP
Page:
KLA - Alpha-Step IQ Profilometer - Characterization SOP
Page:
KOH and TMAH Etch SOP
Page:
Leica EM ACE600 SOP
Page:
Leica RES102-SEM-PlanView SOP
Page:
memsstar Vapour HF Etcher SOP
Page:
Minibrute Furnace SOP
Page:
Nanoscribe Photonic Professional GT SOP
Page:
nGauge AFM SOP
Page:
Orbis PC Micro-XRF SOP
Page:
Oxford Cobra ICPRIE SOP
Page:
Oxford Estrelas ICP-RIE SOP
Page:
Oxford NGP80 RIE SOP
Page:
Parylene Deposition System SOP
Page:
PDMS Process Area SOP
Page:
Perkin Elmer Spectrophotometer SOP
Page:
Photomask Cleaning Station SOP
Page:
PlasmaLab µEtch SOP
Page:
Plasma-Therm Versaline PECVD SOP
Page:
PVA TePla Ion 10Q SOP
Page:
PVD-75 Evaporation System SOP
Page:
RAITH150 Two EBL System SOP
Page:
RAITH Voyager EBL System - SOP
Page:
RCA cleaning SOP
Page:
Renishaw InVia Raman Microscope SOP
Page:
Rigaku XRD SOP
Page:
Signatone Four-Point Probe (Cleanroom) SOP
Page:
Sitek - Semitool 870-S SRD - SOP
Page:
SonoTek ExactaCoat Spray Coater SOP
Page:
Spectrophotometer UV/VIS (Hitachi U-3900H) SOP
Page:
Spin Bake Stations #1 and #2 SOP
Page:
Sputtering System #4 (Moe) SOP
Page:
Suss CB6L Bonder SOP
Page:
SUSS MA6/BA6 Mask Aligner - SOP
Page:
Tescan Vega3 SEM SOP
Page:
Thin Film Stress Measurement - Flexus 2320 SOP
Page:
TPT HB16 Wire bonder SOP
Page:
Trion PECVD SOP
Page:
Trion RIE SOP
Page:
Tystar General Anneal SOP
Page:
Tystar LPCVD SOP
Page:
Tystar Tube 7 (Oxidation) SOP
Page:
University of Alberta HSE Ladder Safety Guidelines
Page:
UV Ozone Bonder SOP
Page:
Wet Process - KOH/TMAH - Wet Deck 2C SOP
Page:
Xenon Difluoride (XeF2) Etch System SOP
Page:
YES - YES3TA HMDS Oven - SOP
Page:
Zeiss EVO SEM EDX SOP
Page:
Zeiss EVO SEM SOP
Page:
Zeiss Sigma FESEM EBSD SOP
Page:
Zeiss Sigma FESEM EDX SOP
Page:
Zeiss Sigma FESEM SOP
Page:
Zeiss Zeiss Versa Xradia 620 SOP
Page:
Zygo Optical Profilometer SOP
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sop
procedure
Recent Changes
Time
Editor
Oct 27, 2020 11:19
Adam Pettigrew
View Changes
Oct 27, 2020 11:11
Adam Pettigrew
View Changes
Oct 27, 2020 11:08
Adam Pettigrew
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Oct 27, 2020 11:07
Adam Pettigrew
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Oct 27, 2020 11:06
Adam Pettigrew
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