ABM Mask Aligner - Bert - SOP | | W1-062 |
ABM Mask Aligner - Grover - SOP | | W1-062 |
ABM UV Flood Exposure System - Sunny - SOP | | W1-062 |
Alcatel AMS110 ICPRIE SOP | | W1-062 |
Allwin AW610 RTA SOP | | ECERF W1-062, clean room, dry etch area |
Atomic Force Microscope (Dimension Edge) SOP | | CME L2-112 |
Autosorb iQ SOP | | ECERF W1-040 |
Autosorb Quantachrome 1MP SOP | | ECERF W1-040 |
AW610 RTA - Recipe editing procedure | | |
Bob Sputtering System SOP | | W1-060 |
Branson Barrel Etcher SOP | Plasma Etch | W1-062 |
Brewer Spinner and Hotplate SOP | | W1-062 |
Bruker XRD D8 Discover SOP | | CMEB L2-136 |
Cold Plate (Stir-Kool Sk-12D) SOP | | Clean room, secondary lithography area |
Contact Angle FTA-200 SOP | Characterization | ECERF W1-040 |
Critical Point Drier SOP | | W1-062 |
Disco DAD 321 Dicing Saw SOP | | W1-060 |
Doug Sputter System SOP | | W1-060 |
Dragonfly Software Offline Process SOP | | ECERF Open area (outside W1-28) |
Dump Rinse Controller Standard Program | Wet Etch | W1-062 |
Dymax BlueWave 200 SOP | | ECERF W1-062 |
EBL Mark Alignment Procedure | Lithography | |
Filmetrics F50-UV SOP | | W1-062 |
Floyd Sputtering System SOP | | W1-060 |
Four-Point Probe (Pro4 4000) SOP | | ECERF W1-040 |
Freeze Dryer SOP | | ECERF w1-040 |
Gomez E-Beam Evaporation System SOP | | W1-060 |
Headway Resist Spinner SOP | Lithography | W1-062 |
Heidelberg MLA150 SOP | | Clean room, W1-062B |
Hitachi S-4800 FESEM SOP | | CME building L2-125A |
How-To Request a Dicing Blade Change | | W1-060 |
How-To Request an Alternative Approved PVD-75 Material | | W1-060 |
IBSS Contamination Control System SOP | | CMEB-L2 121 |
Interfacial Tension SOP | Characterization | ECERF W1-040 |
J.A. Woollam VASE Ellipsometer SOP | | ECERF W1-040 |
JEOL ARM SOP | | CME L2-121 |
KJLC 150LX ALD SOP | | Cleanroom (W1-062) |
KOH and TMAH Etch SOP | Wet Etch | W1-062 |
memsstar Vapour HF Etcher SOP | Dry Etch | W1-062 |
Minibrute Furnace SOP | Film Growth, Deposition | W1-062 |
Nanoscribe Photonic Professional GT SOP | | W1-062, Primary lithography |
Nanoscribe Photonics Professional GT - Standard recipes | | |
Orbis PC Micro-XRF SOP | | ECERF W1-040 |
Oxford Cobra ICPRIE SOP | | W1-062 |
Oxford Estrelas - Chamber Vent Procedure | | W1-062 |
Oxford Estrelas ICP-RIE SOP | | W1-062 |
Oxford NGP80 RIE SOP | | W1-062 |
Parylene Deposition System SOP | | W1-060 |
PDMS Process Area SOP | Polymer Processing | W1-060 |
Perkin Elmer Spectrophotometer SOP | Characterization | W1-040 |
Photomask Cleaning Station SOP | lithography support | W1-062 |
PlasmaLab µEtch SOP | Plasma Etch | W1-062 |
Plasma-Therm Versaline PECVD SOP | | W1-062 |
Processing on the Oxford Estrelas | | |
Processing on the Oxford NGP80 | | |
PVA tePla Ion 10Q SOP | | Cleanroom (W1-062) |
PVD-75 Evaporation System SOP | | W1-060 |
RAITH150 Two EBL System SOP | | Clean room, ECERF W1-062A |
RCA cleaning SOP | | Cleanroom - wet aisle 1 |
Renishaw InVia Raman Microscope SOP | Polymer Processing | W1-060 |
Rigaku XRD SOP | | ECERF w1-040A |
Sitek - Semitool 870-S SRD - SOP | | Aisle 2 |
Spectrophotometer UV/VIS (Hitachi U-3900H) SOP | | ECERF w1-040 |
Sputtering System #4 (Moe) SOP | | 10K |
Suss CB6L Bonder SOP | | W1-062 |
SUSS MA6/BA6 Mask Aligner - SOP | | W1-062 |
Tescan Vega3 SEM SOP | Characterization | ECERF W1-040A |
Thin Film Stress Measurement - Flexus 2320 SOP | | W1-062 |
TPT HB16 Wire bonder SOP | | Characterization Lab, ECERF W1-040 |
Trion PECVD SOP | | W1-062 |
Trion RIE SOP | | W1-062 |
Tystar LPCVD SOP | | ECERF W1-062 |
Tystar Tube 7 (Oxidation) SOP | | ECERF W1-062 |
University of Alberta HSE Ladder Safety Guidelines | | W1-060 |
UV Ozone Bonder SOP | PDMS | W1-062 |
Xenon Difluoride (XeF2) Etch System SOP | Dry Etch | W1-062 |
YES - YES3TA HMDS Oven - SOP | | W1-062 |
Zeiss EVO SEM EDX SOP | | ECERF W1-040A |
Zeiss EVO SEM SOP | | ECERF W1-040 |
Zeiss Sigma FESEM EBSD SOP | | ECERF W1-060 |
Zeiss Sigma FESEM EDX SOP | | ECERF W1-060 |
Zeiss Sigma FESEM SOP | | ECERF W1-060 |
Zeiss Zeiss Versa Xradia 620 SOP | | CME L1-113 |
Zygo Optical Profilometer SOP | Characterization | W1-040 |