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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
RCA cleaning SOP
Created by
Aaron Hryciw
, last modified by
Davor Karacic
on
Jan 17, 2022
Equipment
Wet Deck 1A
/
Wet Deck 1B
Process Area
Wet Processing
Location
Cleanroom - wet aisle 1
Please adhere to specific procedures outlined in SOP document.
sop
wet-deck-1a
wet-deck-1b
hf
rca
hydrogen-peroxide
hydrochloric-acid
ammonium-hydroxide
boe
wet-processing
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{"serverDuration": 80, "requestCorrelationId": "afea25d6354aeeff"}