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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
Headway Resist Spinner SOP
Created by
Michael Hume
, last modified by
Gustavo de Oliveira Luiz
on
Nov 25, 2022
Equipment
Headway Resist Spinner
Process Area
Lithography
Location
W1-062
Hazard Assessment
Please adhere to specific procedures outlined in SOP document.
equipment
sop
headway-spinner
lithography
Overview
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