Below is a listing of the available Standard Operating Procedures (SOP) and Hazard Assessments for the Trion Orion PECVD
Standard Operating Procedures
Title | Location | Process Area |
---|---|---|
Trion PECVD SOP | W1-062 | Deposition
|
Hazard Assessments
Title | Location | Process Area |
---|---|---|
Trion PECVD HA | Plasma Process Area, Cleanroom (W1-062 ECERF) | Deposition |