| ABM Mask Aligner - Bert | Mask Aligner (IR through-wafer) (Bert) | ABM Manual Mask Aligner System With Split-Field Microscope Frontside And BSV/BSIR Backside Alignment | |
| ABM Mask Aligner - Grover | Mask Aligner (Grover) | ABM Large Area Manual Mask Aligner System With Split-Field Dual CCD Camera Alignment | |
| ABM UV Flood Exposure System - Sunny | UV Flood Exposure System (Sunny) | N/A | |
| AJA Orion 8 Sputtering System (Moe) | Sputtering System #4 (Moe) | Orion 8 | |
| Alcatel AMS110 ICPRIE | ICPRIE (Alcatel AMS110) | AMS110 | |
| Allwin Rapid Thermal Anneal AW610 | Allwin AW610 RTA | AW610 | |
| Angstrom Covap Thermal Evaporator III | Organics Evaporator (Angstrom Covap III) | Covap III | |
| Autosorb iQ | Autosorb iQ | AS-iQ-MP-XR | |
| Branson 3000 Barrel Etcher | Branson 3000 Barrel Etcher | 3000 | |
| Brewer 200X Spin Coater | Brewer Spinner and Hotplate | 200X | |
| Brewer 1300X Bake System | Brewer Spinner and Hotplate | 1300X | |
| Brewer Spinner and Hot Plate | Brewer Spinner and Hot Plate | 200X Spinner & 1300X Bake System | |
| Bruker XRD D8 Discover | Bruker D8 XRD / Bruker D8 XRD - Heating | D8 Discover | |
| Contact Angle FTA-200 | Contact Angle FTA-200 | FTA-200 | |
| Critical Point Dryer | Critical Point Dryer | Tousimis 815b | |
| Denton Gold Sputter for SEM | Denton Gold Sputter Unit (for SEM) | DESK II | |
| Disco DAD 321 Dicing Saw | Dicing Saw (Disco DAD 321) | Disco DAD 321 | |
| Disco DAD 3240 Dicing Saw | Dicing Saw (Disco DAD 3240) | DAD3240 | |
| Discovery TGA | Discovery TGA | | |
| Dymax BlueWave 200 | Dymax BlueWave 200 | BlueWave 200 | |
| Electron-Beam Evaporation System #2 (PVD-75) | Electron-Beam Evaporation System #2 (PVD-75) | PVD-75 | |
| Eppendorf Centrifuge 5804R | Eppendorf Centrifuge 5804R | 5804R | |
| Filmetrics F50-UV | Filmetrics F50-UV | F50-UV | |
| Filmetrics Thickness Monitor (F10-VC) | Filmetrics Thickness Monitor (F10-VC) | F10-VC | |
| Fluxim Paios Spectrometer | Fluxim Paios Spectrometer | Paios | |
| Four-Point Probe | Four-Point Probe (Pro4 4000) | Pro4-6M00 | |
| FTIR (8700) spectrometer | FTIR (Nicolet 8700) | 8700 | |
| FTIR is50 | | Nicolet iS50 | |
| Heidelberg DWL200 Pattern Generator | Pattern Generator (Heidelberg DWL-200) | DWL66 / DWL200 | |
| Heidelberg MLA150 Maskless Aligner | Heidelberg MLA150 | Heidelberg MLA150 | |
| IBSS Contamination Control System | IBSS Contamination Control System | Chiaro system with GV10x DownStream Asher | |
| Inert Glove Box | N/A | Inert Purelab 2 | |
| J.A. Woollam VASE Ellipsometer | VASE Ellipsometer | VASE VB-400 | |
| JA Woollam M-2000 Ellipsometer | Ellipsometer (M-2000V) | M-2000V | |
| JEOL JAMP 9500F | Auger Microprobe (JEOL-9500F) | JAMP-9500F | |
| JEOL JEM-ARM200 Atomic Resolution S/TEM | | JEM-ARM200cf S/TEM | |
| Keithley 4200-SCS Analyzer | Keithley 4200-Semiconductor Characterization System (SCS Analyzer) | 4200 | |
| KJLC 150LX Atomic Layer Deposition | ALD - KJLC 150LX | ALD 150LX | |
| KJLC CMS-18 Sputtering System #1 (Bob) | Sputtering System #1 (Bob) | CMS-18 | |
| KJLC CMS-18 Sputtering System #2 (Doug) | Sputtering System #2 (Doug) | CMS-18 | |
| KJLC CMS-18 Sputtering System #3 (Floyd) | Sputtering System #3 (Floyd) | CMS-18 | |
| KLA - Alpha-Step IQ Profilometer - Characterization | Alpha-Step IQ - W1-040 | ASIQ3 | |
| KLA - Alpha-Step IQ Profilometer - Cleanroom | Alpha-Step IQ | ASIQ | |
| Leica EM ACE600 | Leica ACE600 Carbon/Metal coater | EM ACE600 | |
| Leica INM-100 Optical Microscope #1 | Leica INM-100 Optical Microscope #1 | INM-100 | |
| Leica RES102 Ion Mill | Leica RES102 Ion Milling | RES102 | |
| Litho Wet Deck #1 | Litho Wet Deck #1, Litho Wet Deck #1 - TMAH | | |
| Litho Wet Deck #2 | Litho Wet Deck #2, Litho Wet Deck #2 - TMAH | | |
| memsstar Vapour HF Etcher | Vapour HF Etcher (memsstar Orbis Alpha) | Orbis Alpha | |
| Minibrute Middle Furnace (nitrogen/forming gas anneal) | Minibrute Middle Furnace (nitrogen/forming gas anneal) | MB-80 | |
| Minibrute Top Furnace (nitrogen/oxygen anneal) | Minibrute Top Furnace (nitrogen/oxygen anneal) | MB-81 | |
| Nanometrics Hall Measurement | Nanometrics Hall Measurement (HL5500) | HL5500 | |
| Nanoscribe Photonic Professional GT | Nanoscribe Photonic Professional GT | Photonic Professional GT+ | |
| nGauge AFM | nGauge AFM | nGauge AFM | |
| Nikon Eclipse L200N Inspection Microscope | Nikon Eclipse L200N Inspection Microscope | L200N | |
| Olympus LEXT OLS3100 Confocal Laser Scanning | Olympus Laser Confocal Microscope (OLS3000) | OLS31-SU | |
| Orbis PC Micro-EDXRF Elemental Analyzer | Orbis PC Micro-XRF Elemental Analyzer | Orbis PC Micro | |
| Oxford Cobra ICPRIE | ICPRIE (Cobra Reactive Etch) | PlasmaPro 100 Cobra | |
| Oxford Estrelas ICPRIE (DRIE) | ICPRIE - Oxford Estrelas (DSE) | PlasmaPro 100 Estrelas | |
| Oxford NGP80 RIE | RIE (Oxford NGP80) | PlasmaPro 80 RIE | |
| Parylene Deposition System | Parylene Deposition System | PDS-2010 | |
| PDMS Process Area | PDMS Process Area | | |
| Perkin-Elmer NIR-UV Spectrophotometer | Spectrophotometer (Perkin-Elmer NIR-UV) | | |
| Perkin-Elmer NIR-UV Spectrophotometer | Spectrophotometer (Perkin-Elmer NIR-UV) | | |
| PHI 5000 VersaProbe III XPS | XPS Versa Probe III (PHI 5000) | Physical Electronics - Versa Probe III 5000 | |
| Plasma-Therm Versaline PECVD | Plasma-Therm Versaline PECVD | Versaline PECVD | |
| PVA TePla Ion 10Q Photoresist Asher | PVA TePla Photoresist Asher | Ion 10Q | |
| RAITH150 Two EBL System | RAITH150 Two EBL System | 150 Two | |
| Renishaw inVia Raman Microscope | Renishaw InVia Raman MIcroscope | inVia Confocal Raman Microscope | |
| Rigaku XRD Ultima IV | Rigaku XRD Ultima IV | Ultima IV | |
| Savant SuperModulyo Freeze Dryer | Savant SuperModulyo Freeze Dryer | Super Modulyo Freeze dry | |
| Servo Precision Drill Press | Servo Precision Drill Press (7140-M) | 7140-M | |
| Sitek - SemiTool 840-S SRD | Sitek 840-S SRD (top - 100 mm round) Sitek 840-S SRD (bottom - 100 mm square) | SemiTool 840-S | |
| Sitek - SemiTool 870-S SRD | Sitek 870-S SRD (top - 150 mm round) Sitek 870-S SRD (bottom - 100 mm round) | SemiTool 870-S | |
| Spectrophotometer UV/VIS (Hitachi U-3900H) | Spectrophotometer UV/VIS (Hitachi U-3900H) | U-3900H | |
| Speedvac Concentrator | Speedvac Concentrator | SPD121P-115 | |
| Stepcraft D.420 CNC system | Stepcraft D.420 CNC system | STEPCRAFT-2/D.420 | |
| Suss CB6L Bonder | Suss Bonder | CB6L | |
| SUSS MA6/BA6 Mask Aligner | Mask/Bond Aligner (SUSS MA/BA6) | MA6BA6 Mask Aligner | |
| Tescan Vega-3 SEM | Tescan Vega-3 SEM with EDX | Tescan Vega 3 SEM | |
| TOF-SIMS Imaging Spectrometer | TOF-SIMS Imaging Spectrometer (ION-TOF GmbH) | TOF-SIMS Imaging Spectrometer | |
| Toho FLX-2320-S | Thin Film Stress Measurement (FLX 2320S) | FLX-2320-S | |
| TPT HB16 Wire bonder | TPT HB16 Wire bonder | TPT HB16 | |
| Trion Orion PECVD | PECVD (Trion) | Orion PECVD | |
| Trion Phantom RIE | RIE (Trion) | Phantom RIE | |
| Tystar LPCVD - Tube 2 (Nitride) | LPCVD Nitride Deposition | Tytan Mini Series | |
| Tystar LPCVD - Tube 3 (Poly Si) | LPCVD PolySi Deposition | Tytan Mini Series | |
| Tystar LPCVD - Tube 4 (doped Poly Si) | LPCVD Boron Doped polySi Deposition | Tystar Mini Series | |
| Tystar - Tube 5 (Doped Anneal) | Tystar Doped Anneal (tube 5) | Tystar Mini Series | |
| Tystar - Tube 6 (General Anneal) | Tystar General Anneal (tube 6) | Tystar Mini Series | |
| Tystar - Tube 7 (Oxidation) | Tystar Wet [Dry] Oxidation (Tube 7) | Tystar Mini Series | |
| Wet Process - Fumehood Aisle 2 - KOH/TMAH Processing Station | Fumehood Aisle 2 - KOH/TMAH Etch Station | Homemade, consisting of glass etching vessel, heating jacket, condensor, and stir plate. | |
| YES YES3TA HMDS Oven | YES Oven (HMDS #1) | YES3TA | |
| Zeiss EVO MA10 SEM | Zeiss EVO MA10 SEM | EVO MA10 | |
| Zeiss Orion NanoFab He-ion Microscope | Zeiss Orion NanoFab Helium Ion Microscope (Trinity) | NanoFab Orion | |
| Zeiss Sigma FESEM | Zeiss Sigma FeSEM | Sigma | |
| Zeiss Xradia 620 Versa XRM | ZEISS Xradia Versa 620 XRay Microscope | Xradia 620 Versa | |
| Zygo optical profilometer | Zygo Optical Profilometer | NV5000 5032 | |