Below is a listing of the available Standard Operating Procedures (SOP) and Hazard Assessments for the Trion Phantom RIE
Standard Operating Procedures
| Title | Location | Process Area |
|---|---|---|
| Trion RIE SOP | W1-062 | Plasma Etch |
Hazard Assessments
| Title | Location | Process Area |
|---|---|---|
| Trion RIE Hazard Assessment - HA | Plasma Process Area, Cleanroom (W1-062 ECERF) | Plasma Etch |