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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
Allwin AW610 RTA SOP
Equipment
Allwin Rapid Thermal Anneal AW610
Process Area
Ancillary
Location
ECERF W1-062, clean room, dry etch area
Hazard Assessment
Allwin AW610 RTA HA
Please adhere to specific procedures outlined in SOP document.
sop
ancillary
allwin-aw610-rta
Overview
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