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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
Minibrute Furnace SOP
Created by
Michael Hume
, last modified by
Timothy Harrison
on
Nov 18, 2022
Equipment
Minibrute
Process Area
Film Growth, Deposition
Location
W1-062
Hazard Assessment
Minibrute Top/Middle Furnace HA
Please adhere to specific procedures outlined in SOP document.
equipment
sop
minibrute
furnace
film-growth
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