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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
Trion RIE SOP
Equipment
Trion Phantom RIE
Process Area
Plasma Etch
Location
W1-062
Please adhere to specific procedures outlined in SOP document.
equipment
sop
plasma-etch
trion
rie
plasma
etch
trion-phantom-rie
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