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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
PVD-75 Evaporation System SOP
Created by
Timothy Harrison
, last modified on
Oct 24, 2022
Equipment
Electron-Beam Evaporation System #2 (PVD-75)
Process Area
Deposition
Location
W1-060
Hazard Assessment
Electron-Beam Evaporation System #2 (PVD-75) HA
Please adhere to specific procedures outlined in SOP document.
sop
deposition
pvd-75
evaporation
Overview
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{"serverDuration": 72, "requestCorrelationId": "45a4a3c6000feb5c"}