System Features
6-pocket e-beam hearth: Al, Ti, Cr, Au, Ag, and Ni. Pocket 5 material (Ag), may be changed out at user request | |
Alternative approved materials (available with >24 hr notice): Ag, Cu | |
Cryo pumped with a base pressure of <1e-7 Torr; <4e-7 Torr achievable within 30 min pumpdown | |
Automatic deposition recipes | |
300 mm Ø platen with room for substrates up to 150 mm diameter | |
Rotating substrate holder | |
Typical uniformity of <5% over a 150 mm wafer, <2% over a 100 mm wafer |
Documents
Operating Procedure | |
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Hazard Assessment | Electron-Beam Evaporation System #2 (PVD-75) HA |
QCM Material Parameters | QCM Material Parameters |
Pocket 5 Material Change | How-To Request an Alternative Approved PVD-75 Material |