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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
Floyd Sputtering System SOP
Equipment
KJLC CMS-18 Sputtering System #3 (Floyd)
Process Area
Deposition
Location
W1-060
Hazard Assessment
Sputtering System #3 (Floyd) HA
Please adhere to specific procedures outlined in SOP document.
equipment
sop
floyd
cms-18
sputtering
kjlc-cms18-sputter-floyd
$labeltext
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{"serverDuration": 62, "requestCorrelationId": "57983d0a6d850582"}