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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
Gomez E-Beam Evaporation System SOP
Created by
Michael Hume
, last modified by
Timothy Harrison
on
Oct 05, 2022
Equipment
KJL E-beam evaporation (Gomez)
Process Area
Deposition
Location
W1-060
Please adhere to specific procedures outlined in SOP document.
equipment
sop
gomez
e-beam
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