Brewer Spinner and Hot Plate

Overview

Spinner and hotplate set-up for most EBL resist spinning applications.

LMACS Name	Brewer Spinner and Hot Plate
Process Area	Lithography
Model	200X Spinner & 1300X Bake System
Vendor	Brewer Science
Team	Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Adam Pettigrew

Tools

Key Documents

SOP	Brewer Spinner and Hotplate SOP
Hazard Assessment	Brewer Spinner and Hotplate HA

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