Brewer 200X Spin Coater

Overview

Spin Coater set-up for most EBL resist spinning applications.

LMACS Name	Brewer Spinner and Hotplate
Confluence Label	brewer-200x-spin-coater
Process Area	Lithography
Model	200X
Vendor	Brewer Science
Team	Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Adam Pettigrew

System Features

Chucks for specimen sizes ranging from 3 mm to 100 mm
Maximum spin speed of 12 000 RPM
Removable bowl lining for easy cleaning

Key Documents

SOP	Brewer Spinner and Hotplate SOP
Hazard Assessment	Brewer Spinner and Hotplate HA

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