Overview

Hotplate set-up for most EBL resist spinning applications.

LMACS NameBrewer Spinner and Hotplate
Confluence Labelbrewer-1300x-bake-system
Process Area

Lithography

Model1300X
VendorBrewer Science
Team

Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Adam Pettigrew



System Features

Uniform and reliable, always set at 180°C
Contact, vacuum, and proximity bake methods
Hotplate substrate sizes: <1 cm to 200 mm round; 8" × 8" square

Programmable lift pins to raise substrates from 0.000" to 0.750" in 0.001" increments

Key Documents

SOPBrewer Spinner and Hotplate SOP
Hazard AssessmentBrewer Spinner and Hotplate HA

Related Documents