YES YES3TA HMDS Oven

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Overview

An automatic HMDS vapour prime oven to promote photoresist adhesion on silicon, silicon dioxide, and silicon nitride surfaces.

LMACS Name	YES Oven (HMDS #1)
Confluence Label	yes-yes3ta-hmds-oven
Process Area	Lithography
Model	YES3TA
Vendor	Yield Engineering
Team	Stephanie Bozic Scott Munro Aaron Hryciw Michael Hume Adam Pettigrew

System Features

Automatic HMDS dispense
Tooling for 6" or 4" wafers and pieces.

Key Documents

SOP	YES - YES3TA HMDS Oven - SOP
Hazard Assessment	YES - YES3TA HMDS Oven - HA

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