| Product | HEXAMETHYLDISILAZANE |
|---|---|
| Manufacturer | Integrated Micro Materials |
| Composition | 1,1,1,3,3,3-Hexamethyldisilazane |
| Synonyms | HMDS |
| Typical Uses | Adhesion promoter in photolithography |
| Hazards |
|
| Storage | P1-004 |
| Disposal | Used in vapour form under vacuum in the YES YES3TA HMDS Oven. Pump exhausts to general building exhaust. |
| Comments | No application outside the YES YES3TA HMDS Oven |
| Status | STOCKED |
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Please contact a nanoFAB staff member for uses not listed above.