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Overview

Fourier-transform infrared spectroscopy (FTIR)[1] is a technique used to obtain an infrared spectrum of absorption or emission of a solid, liquid or gas. An FTIR spectrometer simultaneously collects high-resolution spectral data over a wide spectral range.

LMACS Name

FTIR (Nicolet 8700)

Confluence Label

Process Area

Characterization

Model8700
VendorThermo Nicolet
Team

Shiau-Yin Wu Nancy Zhang 




System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC

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