Fourier-transform infrared spectroscopy (FTIR)[1] is a technique used to obtain an infrared spectrum of absorption or emission of a solid, liquid or gas. An FTIR spectrometer simultaneously collects high-resolution spectral data over a wide spectral range.




LMACS Name

FTIR (Nicolet 8700)

Confluence Label

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Company-Model#-Tool

Process Area

Model8700
VendorThermo Nicolet
Team

Shiau-Yin Wu Nancy Zhang 






Serial NumberInsert the equipment serial number
UofA Asset Tag NumberInsert the equipment UofA Asset tag number
Service Contract

   

Purchase Info
Installation



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Contacts


NameCompanyEmailPhone
Technical ContactInsert the technical contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces (mounted)100 mm150 mm
Gas SpeciesO2C4F8SF6Ar
ICP Power3 kW


RF Power300 W


Chuck-150 ºC (min)80 ºC (max)mechanical clampHBC



Staff Documents

Operator Manual
Service Manual
Installation Guide
System Drawings

Drive Folder


Related Documents