Overview

Thin film thickness measurements with simultaneous reflectance and transmittance measurements. 

LMACS Name

Filmetrics Thickness Monitor (F10-VC)

Confluence Labelfilmetrics-F10-VC
Process Area

Characterization

Model

F10-VC

VendorFilmetrics
Team



System Features

1

Substrate size: ~5 mm × 5 mm to 200 mm diameter
2Minimum Thickness: 15 nm 
3Min. thickness to measure n and k: 100 nm
4Wavelength range: 380–1100 nm
5Spot size: 1.5 mm

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