Filmetrics Thickness Monitor (F10-VC)

Overview

Thin film thickness measurements with simultaneous reflectance and transmittance measurements.

LMACS Name	Filmetrics Thickness Monitor (F10-VC)
Confluence Label	filmetrics-F10-VC
Process Area	Characterization
Model	F10-VC
Vendor	Filmetrics
Team	Nastaran Yousefi Devin Fortier Peng Li
Location	CME-L2-128

System Features

1	Substrate size: ~5 mm × 5 mm to 200 mm diameter
2	Minimum Thickness: 15 nm
3	Min. thickness to measure n and k: 100 nm
4	Wavelength range: 380–1100 nm
5	Spot size: 1.5 mm

Other Documents

SOP
Hazard Assessment	F10-VC HA

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