Title: Tystar Furnaces  
Author: Michael Hume Mar 05, 2020
Last Changed by: Timothy Harrison Apr 15, 2024
Tiny Link: (useful for email) https://confluence.nanofab.ualberta.ca/x/9wOIAQ
Export As: Word · PDF  
Incoming Links
Equipment (1)
    Page: Tystar Furnaces SOP & HA Listing
Hierarchy
Parent Page
    Page: Equipment List
Children (7)
    Page: Tystar Furnaces SOP & HA Listing
    Page: Tystar LPCVD - Tube 2 (Nitride)
    Page: Tystar LPCVD - Tube 3 (Poly Si)
    Page: Tystar LPCVD - Tube 4 (doped Poly Si)
    Page: Tystar - Tube 5 (Doped Anneal)
    Page: Tystar - Tube 6 (General Anneal)
    Page: Tystar - Tube 7 (Oxidation)
Labels
Global Labels (3)
Recent Changes
Time Editor  
Apr 15, 2024 14:54 Timothy Harrison View Changes
Jan 04, 2024 12:01 Aaron Hryciw View Changes
May 03, 2023 09:38 Devin Fortier View Changes
Jan 18, 2023 08:48 Timothy Harrison View Changes
Nov 01, 2022 09:39 Aaron Hryciw  
Outgoing Links
External Links (12)
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    https://en.tystar.com/
    mailto:long@tystar.com
    https://en.tystar.com/products/tytan/mini-series
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    mailto:sales@lpglassblowing.com
    mailto:henryh@tystar.com
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    https://mail.google.com/mail/u/0/?hl=en&view=cm&tf=1&fs=1&t…
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
Equipment (6)     Page: Tystar - Tube 6 (General Anneal)
    Page: Tystar - Tube 5 (Doped Anneal)
    Page: Tystar - Tube 7 (Oxidation)
    Page: Tystar LPCVD - Tube 2 (Nitride)
    Page: Tystar LPCVD - Tube 3 (Poly Si)
    Page: Tystar LPCVD - Tube 4 (doped Poly Si)