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Overview

An atmospheric-pressure quartz tube furnace for general annealing and glass bonding. No metals are allowed in this furnace; metal-containing wafers can be annealed in the Muffle Furnace or Tystar Doped Anneal tool.

Process Gases

Process GasesMax Flow (MFC Range)
N2

10000 sccm

Temperature Range

ZoneMinMax
1500 C1100 C
2500 C1100 C
3500 C1100 C

System Features

Temperature



Duration



Documents

Operating Procedure
Hazard Assessment