LPCVD Tube Configuration & Chemistry
The LPCVD Stack contains 3 furnaces, each configured for unique processing, with different chemistry. Details of the configuration are listed below.
Tube Number | Process Name | Chemistry |
---|---|---|
1 | EMPTY | N/A |
2 | Nitride | DCS, NH3 |
3 | Poly Si | (100%) SiH4 |
4 | Boron Doped Poly Si | (100%) SiH4, (3%) BCl3 |
5 | Doped Anneal | N2 |
6 | General Anneal | N2 |
7 | Oxidation | Oxygen, H2O |
8 | EMPTY | N/A |