Overview

The Ion 10Q plasma system is a barrel plasma reactor, designed for batch processing of photoresist ashing, descum, surface activation and cleaning.

LMACS NamePVA TePla Photoresist Asher
Confluence Label

pva-tepla


Process Area

Plasma Etch

ModelIon 10Q
VendorPVA TePla
Team



System Features


Documents

Operating Procedure
Hazard Assessment

Related Documents