System Features
| Wafer Handling | pieces (mounted) | 100 mm | 150 mm | |||
|---|---|---|---|---|---|---|
| Gas Species | O2 | C4F8 | SF6 | Ar | CH4 | He |
| ICP RF Power | 3 kW | |||||
| Chuck RF Power | 300W LF (300kHz) | 1kW HF (13.56MHz) | ||||
| Chuck | -20 ºC (min) | 80 ºC (max) | mechanical clamp | HBC |
Documents
| Operating Procedure | |
|---|---|
| Hazard Assessment | Alcatel AMS110 ICPRIE Hazard Assessment - HA |