Electron-Beam Evaporation System #1 (Gomez)

Overview

A four-pocket manual electron-beam evaporation system for deposition of dielectric and metal thin films.

One of the pockets, labelled "Au", has been designated for gold deposition only. Please have staff refill aluminum and gold pellets.

LMACS Name	Electron-Beam Evaporation System #1 (Gomez)
	electron-beam-evaporation-system-1-gomez
Process Area	Deposition
Vendor	Kurt J Lesker
Team	Timothy Harrison Aaron Hryciw Glenn Elaschuk

System Features

Operating Procedure	Gomez E-Beam Evaporation System SOP
Hazard Assessment	Electron-Beam Evaporation System #1 (Gomez) HA
QCM Material Parameters	QCM Material Parameters