System Features
Four-pocket e-beam hearth | |
Materials: metals, oxides | |
Gas species: Ar, O2 | |
No substrate rotation |
Documents
Operating Procedure | |
---|---|
Hazard Assessment | Electron-Beam Evaporation System #1 (Gomez) HA |
QCM Material Parameters |
Related Documents
Four-pocket e-beam hearth | |
Materials: metals, oxides | |
Gas species: Ar, O2 | |
No substrate rotation |
Operating Procedure | |
---|---|
Hazard Assessment | Electron-Beam Evaporation System #1 (Gomez) HA |
QCM Material Parameters |