Overview

A four-pocket manual electron-beam evaporation system for deposition of dielectric and metal thin films.

One of the pockets, labelled "Au", has been designated for gold deposition only.  Please have staff refill aluminum and gold pellets.

LMACS NameElectron-Beam Evaporation System #1 (Gomez)

electron-beam-evaporation-system-1-gomez
Process Area

Deposition

VendorKurt J Lesker
Team

Timothy Harrison  Aaron Hryciw Glenn Elaschuk





System Features


Four-pocket e-beam hearth

Materials: metals, oxides

Gas species:  Ar, O2

No substrate rotation

Documents

Operating Procedure

Gomez E-Beam Evaporation System SOP

Hazard AssessmentElectron-Beam Evaporation System #1 (Gomez) HA
QCM Material Parameters

QCM Material Parameters

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