This is a list of all known materials allowed and prohibited from use in the nanoFAB PVD tools. Any material not on this list must be approved (through an LMACS Chemical/material import request) prior to use in these tools.

N.B. The existence of any material on this list does not mean that the nanoFAB has source material available for use. In-stock materials may be subject to change depending on material costs and usage rates.

Only metal targets/deposition materials are permitted for use in KJLC CMS-18 Sputtering System #1 (Bob), KJLC CMS-18 Sputtering System #3 (Floyd), and Electron-Beam Evaporation System #2 (PVD-75).

For non-metal and reactive depositions (i.e., with process gases other than pure Ar), please use KJLC CMS-18 Sputtering System #2 (Doug), AJA Orion 8 Sputtering System (Moe), Electron-Beam Evaporation System #1 (Gomez), or GLAD System (Achilles).

Legend

SymbolMeaning
(tick)Approved for use in tool
(error)Prohibited from use in tool
(warning)Consult nanoFAB staff for details

nanoFAB in-stock deposition material available for use

Material matrix

Chemical symbolMaterial nameApproved for use in:
Sputtering System #1 (Bob)Sputtering System #2 (Doug)Sputtering System #3 (Floyd)Sputtering System #4 (Moe)E-Beam Evaporation System #1 (Gomez)E-Beam Evaporation System #2 (PVD-75)GLAD System (Achilles)
AgSilver(tick)(tick) (tick)(tick)(tick)(tick)(tick)
AlAluminum(tick)(tick)(tick)(tick)(tick)(tick)(tick)
Al2O3Alumina (Aluminum oxide)(error)(warning)(error)(tick)(tick)(error)(warning)
AuGold(tick)(tick)(tick)(warning)(tick)(tick)(tick)
BBoron(error)(error)(error)(tick)(error)(error)(error)
BeBeryllium(error)(error)(error)(error)(error)(error)(error)
BiBismuth(error)(error)(error)(tick)(error)(error)(error)
CCarbon (graphite)(error)(error)(error)(tick)(error)(error)(tick)
CdCadmium(error)(error)(error)(error)(error)(error)(error)
CoCobalt(tick)(tick)(error)(tick)(warning)(warning)(warning)
Co/FeCobalt/Iron (25/75 wt. %)(error)(error)(error)(warning)(error)(error)(error)
CrChromium(tick)(tick)(tick)(tick)(tick)(tick)(tick)
CuCopper(tick)(tick)(error)(tick)(tick)(tick)(tick)
FeIron(tick)(tick)(error)(tick)(warning)(warning)(warning)
Fe/Gd/CoIron/Gadolinium/Cobalt (68/24/8 wt. %)(error)(error)(error)(warning)(error)(error)(error)
Fe2O3Iron(III) oxide(error)(warning)(error)(tick)(error)(error)(error)
Ga2O3Gallium(III) oxide(error)(error)(error)(warning)(error)(error)(error)
GeGermanium(error)(warning)(error)(tick)(warning)(error)(warning)
HfHafnium(warning)(warning)(warning)(tick)(warning)(warning)(warning)
HfO2Hafnium(IV) oxide(error)(warning)(error)(warning)(warning)(error)(error)
IGZOIndium gallium zinc oxide(error)(warning)(error)(warning)(error)(error)(error)
Ir/MnIridium/Manganese (22/78 wt. %)(error)(error)(error)(warning)(error)(error)(error)
InIndium(error)(error)(error)(tick)(error)(error)(error)
ITOIndium tin oxide(error)(tick)(error)(tick)(warning)(error)(error)
IZOIndium zinc oxide(error)(warning)(error)(warning)(error)(error)(error)
LiLithium(error)(error)(error)(error)(error)(error)(error)
LiC6O2Lithium carbonate(error)(error)(error)(warning)(error)(error)(error)
LiNbO3Lithium niobate(error)(error)(error)(warning)(error)(error)(error)
Li3PO4Lithium phosphate(error)(error)(error)(warning)(error)(error)(error)
MgMagnesium(error)(error)(error)(warning)(warning)(error)(warning)
MnManganese(error)(error)(error)(tick)(warning)(error)(warning)
MoMolybdenum(tick)(tick)(tick)(tick)(warning)(warning)(warning)
NbNiobium(tick)(tick)(tick)(tick)(warning)(warning)(warning)
NaSodium(error)(error)(error)(error)(error)(error)(error)
NiNickel(tick)(tick)(error)(tick)(tick)(tick)(warning)
Ni-Cr (80/20 wt%)Nichrome(tick)(tick)(error)(tick)(warning)(error)(warning)
Ni-V (93/7 wt%)Nickel Vanadium(tick)(tick)(error)(tick)(error)(error)(error)
PbLead(error)(error)(error)(error)(error)(error)(error)
PdPalladium(tick)(tick)(tick)(warning)(warning)(warning)(warning)
Ni-Fe (80/20 wt%)Permalloy(tick)(tick)(error)(tick)(tick)(error)(warning)
PtPlatinum(tick)(tick)(tick)(warning)(tick)(warning)(warning)
RuRuthenium(warning)(warning)(warning)(warning)(warning)(warning)(warning)
SbAntimony(error)(error)(error)(tick)(error)(error)(error)
SeSelenium(error)(error)(error)(error)(error)(error)(error)
SiSilicon(error)(tick)(error)(tick)(tick)(error)(tick)
SiO2Silicon dioxide(error)(warning)(error)(tick)(tick)(error)(warning)
SnTin(error)(error)(error)(tick)(warning)(error)(error)
SnO2Tin(IV) oxide(error)(warning)(error)(warning)(warning)(error)(error)
SS-305Stainless steel (305)(tick)(tick)(error)(warning)(error)(error)(error)
SS-310Stainless steel (310)(warning)(warning)(error)(tick)(error)(error)(error)
SS-304LStainless steel (304L)(warning)(warning)(error)(tick)(error)(error)(error)
TaTantalum(tick)(tick)(tick)(tick)(warning)(warning)(warning)
TeTellurium(error)(error)(error)(warning)(error)(error)(error)
TiTitanium(tick)(tick)(tick)(tick)(tick)(tick)(tick)
TiO2Titanium (IV) oxide(error)(warning)(error)(tick)(tick)(error)(error)
Ti/W (10/90 wt %)Ti-Tungsten alloy(tick)(tick)(tick)(tick)(error)(error)(error)
VVanadium(warning)(warning)(tick)(tick)(warning)(warning)(warning)
VNVanadium nitride(error)(error)(error)(tick)(error)(error)(error)
WTungsten(tick)(tick)(tick)(tick)(warning)(error)(error)
YYttrium(error)(error)(error)(warning)(warning)(error)(warning)
Yb2O3Ytterbium(III) oxide(error)(error)(error)(warning)(warning)(error)(error)
ZnZinc(error)(error)(error)(error)(error)(error)(error)
ZnOZinc oxide(error)(tick)(error)(tick)(error)(error)(error)
ZrZirconium(tick)(tick)(error)(tick)(warning)(error)(warning)
ZrO2 (~5% Y2O3)Zirconium dioxide (partially stabilized by Yttria)(error)(error)(error)(tick)(warning)(error)(error)
ZrO2 (~8mol% Y2O3)Zirconium dioxide (fully stabilized by Yttria)(error)(error)(error)(tick)(warning)(error)(error)