Title: Trion PECVD process information  
Author: Aaron Hryciw May 17, 2021
Last Changed by: Timothy Harrison Mar 25, 2024
Tiny Link: (useful for email) https://confluence.nanofab.ualberta.ca/x/ooT3Ag
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Incoming Links
Equipment (1)
    Page: Trion Orion PECVD
Hierarchy
Parent Page
    Page: Trion Orion PECVD
Children (4)
    Page: Trion PECVD nitride_historical (Si3N4) Recipe Information
    Page: Trion PECVD Nitride_Standard (Si3N4) Recipe Information
    Page: Trion PECVD Oxide_Standard (SiO2) Recipe Information
    Page: Trion PECVD process information update 2021
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Recent Changes
Time Editor  
Mar 25, 2024 08:58 Timothy Harrison View Changes
Mar 25, 2024 08:57 Timothy Harrison View Changes
May 17, 2021 11:19 Aaron Hryciw View Changes
May 17, 2021 11:19 Aaron Hryciw View Changes
May 17, 2021 11:19 Aaron Hryciw  
Outgoing Links
Equipment (1)     Page: Trion Orion PECVD