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nanoFAB Equipment
Equipment List
Trion Orion PECVD
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Trion PECVD process information
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Created by
Aaron Hryciw
, last modified on
May 17, 2021
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Equipment
Trion Orion PECVD
Synonyms
PECVD
Process Area
Deposition
application-note
trion
trion-orion-pecvd
pecvd
$labeltext
Overview
Content Tools
{"serverDuration": 62, "requestCorrelationId": "6ef529a7287fb584"}