Title: Allwin Rapid Thermal Anneal AW610  
Author: Michael Hume Jun 17, 2020
Last Changed by: Aaron Hryciw Apr 24, 2023
Tiny Link: (useful for email) https://confluence.nanofab.ualberta.ca/x/6BSIAQ
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Incoming Links
Equipment (4)
    Page: Allwin AW610 RTA HA
    Page: Allwin AW610 RTA SOP & HA Listing
    Page: AW610 RTA - Recipe editing procedure
    Page: Allwin AW610 RTA SOP
Hierarchy
Parent Page
    Page: Equipment List
Children (4)
    Page: Allwin AW610 RTA SOP & HA Listing
    Page: AW610 RTA - Recipe editing procedure
    Page: RTA – Susceptor usage guidelines
    Page: Thermocouple installation
Labels
Global Labels (4)
Recent Changes
Time Editor  
Apr 24, 2023 12:47 Aaron Hryciw View Changes
Nov 04, 2022 10:52 Aaron Hryciw View Changes
Nov 04, 2022 10:46 Aaron Hryciw View Changes
Aug 02, 2022 16:47 Timothy Harrison View Changes
Jul 28, 2022 11:02 Gustavo de Oliveira Luiz  
Outgoing Links
External Links (6)
    mailto:peterchen@allwin21.com
    https://admin.nanofab.ualberta.ca/equipment-detail.php?tool…
    https://allwin21.com/
    https://confluence.nanofab.ualberta.ca/label/allwin-aw610-r…
    https://allwin21.com/accuthermo-aw-610/
    mailto:hunterliu@allwin21.com
Equipment (4)     Page: 2020-06 Allwin AW610 RTA Installation
    Page: AW610 RTA - Recipe editing procedure
    Page: Allwin AW610 RTA SOP
    Page: Allwin AW610 RTA HA