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Overview

The AccuThermo AW610 was derived from the AG Associates 610 production-proven design. Allwin21 Corp. is the exclusive manufacturer of the AG Associates Heatpulse 610 desktop atmospheric RTP (Rapid Thermal Processing) system. The system uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1-600 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing.

LMACS NameAllwin AW610 RTA
Confluence Labelallwin-aw610-rta
Process Area

Ancillary

ModelAW610
VendorAllwin
Team



System Features

Wafer HandlingSmall pieces, 2", 3", 4", 5", 6" wafer capability
Process Gases(3%-5%) H2:N2, N2, Ar
Temperature Range150°C - 1150°C
Ramp Up Rate

Programmable, 10°C to 120°C per second.

Ramp Down Rate Non-programmable, 10°C to 200°C (sample and chamber conditions dependent)
Steady State Duration0-600 seconds per step (temperature dependent)
Temperature Repeatability±0.5°C or better at 1150°C wafer-to-wafer.
Temperature Uniformity±5°C across a 6" (150 mm) wafer at 1150°C.

Documents

Operating Procedure
Hazard AssessmentAllwin AW610 RTA HA
Recipe EditingAW610 RTA - Recipe editing procedure