Overview

The AccuThermo AW610 was derived from the AG Associates 610 production-proven design. Allwin21 Corp. is the exclusive manufacturer of the AG Associates Heatpulse 610 desktop atmospheric RTP (Rapid Thermal Processing) system. The system uses high intensity visible radiation to heat single wafers/specimens for short process periods of time at precisely controlled temperatures. The process periods are typically 1-600 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing.

LMACS NameAllwin AW610 RTA
Confluence Labelallwin-aw610-rta
Process Area

Ancillary

ModelAW610
VendorAllwin
Team

Gustavo de Oliveira Luiz Adam Pettigrew Glenn Elaschuk  Aaron Hryciw



System Features

Wafer HandlingSmall pieces, 2", 3", 4", 5", 6" wafer capability
Process GasesN2, Ar, forming gas (3%–5% H2 / balance N2)
Temperature Range150–1150 °C (max. 950 °C with susceptor)
Ramp-Up Rate

Programmable, 10–120 °C/s

Ramp-Down Rate Non-programmable, 10–200 °C/s (sample and chamber conditions dependent)
Steady-State Duration0–600 seconds per step (temperature dependent)
Temperature Repeatability±0.5 °C or better at 1150 °C (wafer-to-wafer)
Temperature Uniformity±5 °C across a 6" (150 mm) wafer at 1150 °C

Documents

Operating Procedure

Allwin AW610 RTA SOP

Hazard AssessmentAllwin AW610 RTA HA
Recipe EditingAW610 RTA - Recipe editing procedure

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