Page Information

Title:	PT PECVD SiO2 Standard Recipe Information
Author:	Aaron Hryciw	May 04, 2022
Last Changed by:	Timothy Harrison	Mar 25, 2024
Tiny Link: (useful for email)	https://confluence.nanofab.ualberta.ca/x/zAWhB
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Equipment (1)     Page: Trion PECVD Oxide_Standard (SiO2) Recipe Information

Parent Page     Page: Plasma-Therm PECVD process information

• process-info
• plasmatherm-versaline-pecvd
• pecvd

Time	Editor
Mar 25, 2024 09:47	Timothy Harrison	View Changes
Feb 14, 2023 14:42	Aaron Hryciw	View Changes
Jan 16, 2023 12:16	Aaron Hryciw	View Changes
Jan 16, 2023 12:16	Aaron Hryciw	View Changes
Jan 16, 2023 12:11	Aaron Hryciw

External Links (1)
    https://drive.google.com/file/d/1cJGsTxhTza6BNc9_h-Cm1e16Mf…

Equipment (2)     Page: Standard qual measurements     Page: PT PECVD SiO2 Standard Recipe Information