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Process information for HfO2 films deposited on the KJLC ALD 150LX system. |
Recipe parameters - Thermal HfO2 (TDMAH + H2O)
Recipe name | PR - ALD HfO2 (TDMAH + H2O) |
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Substrate Temperature (°C) | 250 |
TDMAH Dose (ms) | 200 |
Ar Purge 1 (ms) | 10000 |
H2O Dose (ms) | 20 |
Ar Purge 2 (ms) | 10000 |
Uniformity
Film properties
Growth rate (nm/cycle) | 0.079095 |
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Uniformity, SUP (± %) | 0.2 |
Refractive index (λ = 633 nm) | 2.05 |
Recipe parameters - Plasma HfO2 (TDMAH + O2 Plasma)
Recipe name | PR - PEALD HfO2 (TDMAH + O2 Plasma) |
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Substrate Temperature (°C) | 250 |
TDMAH Dose (ms) | 140 |
Ar Purge 1 (ms) | 10000 |
O2 Plasma Dose (ms) | 5000 |
Ar Purge 2 (ms) | 5000 |
Film properties
Growth rate (nm/cycle) | 0.095 |
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Uniformity, SUP (± %) | 1.2 |
Uniformity
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Qualification process procedure (edit to match procedure for this material)Acquisition parameters for metrology are given in the acquisition parameters from the PECVD Standard qual measurements.
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