These pages list process information for the qualified material deposition recipes on the KJLC ALD 150LX system, including recipe parameters, physical and optical film characteristics, and etch behaviour using standard etch recipes.
- KJLC 150LX ALD - Al2O3 - Standard Recipe Information
- KJLC 150LX ALD - AlN - Standard Recipe Information
- KJLC 150LX ALD - HfO2 - Standard Recipe Information
- KJLC 150LX ALD - Si3N4 - Standard Recipe Information
- KJLC 150LX ALD - SiO2 - Standard Recipe Information
- KJLC 150LX ALD - TiN - Standard Recipe Information
- KJLC 150LX ALD - ZrO2 - Standard Recipe Information