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titleOverview

Spinner and hotplate set-up for most EBL resist spinning applications.



Page properties
idequipment-properties


LMACS NameBrewer Spinner and Hot Plate
Process Area

Equipment process area
EquipmentAreaLithography

Model200X Spinner & 1300X Bake System
VendorBrewer Science
Team

Stephanie Bozic Gustavo de Oliveira Luiz Scott Munro Aaron Hryciw Adam Pettigrew

Tools

Children Display

Key Documents

SOPBrewer Spinner and Hotplate SOP
Hazard AssessmentBrewer Spinner and Hotplate HA




Related Documents

Content by Label
cqllabel = "equipment"