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nanoFAB Equipment
Standard Operating Procedures (SOP)
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Brewer Spinner and Hotplate SOP
Equipment
Brewer Spinner
and
hotplate
Process Area
Lithography
Location
W1-062
Please adhere to specific procedures outlined in SOP document.
equipment
sop
lithography
brewer-200x-spin-coater
brewer-1300x-bake-system
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