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The Leica EM RES102 is a unique ion beam milling device that has two saddlefield ion sources with variable ion energy for optimum milling results. It accommodates the preparation of TEM, SEM and FIB samples in a single benchtop unit. In addition to high-energy milling, the Leica EM RES102 can be used for very gentle sample processing using low ion energy. |
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Contacts
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System Features
Table to highlight system features these can be displayed in the format that makes the most sense for the tool. The table below is an example using an ICP-RIE
Sample Mounting | TEM | SEM stub | FIB | ||
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| Gas Species | Argon | ||||
| Ion Energy | 0.8 keV → 10 keV | ||||
| Source Current | Up to 4.5 mA (per ion source) | ||||
| Sample Movements | 0.6 → 10rpm rotation | 360deg, 1deg steps oscillation | +-45deg gun tilting | -120 → 210 deg sample holder tilting | -90 → 90 deg milling angle range |
Documents
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| Hazard Assessment |
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Staff Documents
Drive Folder
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Related Documents
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