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nanoFAB Equipment
Standard Operating Procedures (SOP)
Jira links
PVA TePla Ion 10Q SOP
Equipment
PVA TePla Ion 10Q Photoresist Asher
Process Area
Plasma Etch
Location
Cleanroom (W1-062)
Please adhere to specific procedures outlined in SOP document.
sop
plasma-etch
pva-tepla
Overview
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