Nanometrics Hall Measurement

Overview

Semiconductor characterization of resistivity, carrier concentration and mobility utilizing the hall effect.

LMACS Name	Nanometrics Hall Measurement (HL5500)
Confluence Label	nanometrics-hl5500-hall-measurement
Process Area	Characterization
Model	HL5500
Vendor	nanometrics
Team	Nastaran Yousefi Devin Fortier
Location	CME-L2-128

System Features

	Basic	With Buffer option
Possible Measurement Configurations	Van der Pauw, Hall Bar and Bridge measurements	Van der Pauw, Hall Bar and Bridge measurements
Magnet	Rare earth permanent magnet, 0.320 Tesla, 0.1% stability	Rare earth permanent magnet, 0.320 Tesla, 0.1% stability
Sample Size	up to 3”	up to 3”
Current Range	100nA - 20mA	1pA - 10mA
Voltage Range	4mV - 200mV	4mV - 200mV
Resistivity Range	10^-4 - 10⁶Ohm/square	10^-1 - 10¹¹ Ohm/square
Carrier Concentration Range	10⁶ - 10²¹ cm-3
Carrier Mobility Range	1 - 10⁷cm2V-1s-1

SOP
Hazard Assessment	Nanometrics Hall Measurement HA