Versions Compared

Old Version 11

changes.mady.by.user Adam Pettigrew

Saved on

compared with

New Version 12

changes.mady.by.user Aaron Hryciw

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Note
iconfalse
titleOverview

Two-dimensional surface topography profiler with sub-8-angstrom step height repeatability and sub-angstrom resolution. Ideal for thin-film profilometry and measuring the step height of various materials.



Page properties
idequipment-properties


LMACS NameAlpha-Step IQ
Process Area

Equipment process area
EquipmentAreaCharacterization

ModelASIQ
VendorKLA Instruments
Team

Scott MunroStephanie BozicAaron HryciwMichael Hume Adam Pettigrew




Show If
groupnf-staff


Serial Number7083297
Part Number0051047-00
Software VersionVersion 2.2.1
Software LicenseKT-0E0CF35DU
UofA Asset Tag Number
Service Contract

 

Status
colourRed
titleNO




Show If
groupnf-staff

Contacts


NameCompanyEmailPhone
Technical Contact


Sales ContactInsert the sales contact




System Features

Wafer Handlingpieces 100 mm150 mm


Key Documents

Stage Raising Instructions

Google Drive Live Link
urlhttps://drive.google.com/file/d/1LNZ_71SdIh8tb5onaZuE2vdCAaymjxn4/view?usp=drivesdk

Wafer Handling



Show If
groupnf-staff

Staff Documents

Operator Manual

Google Drive Live Link
urlhttps://drive.google.com/file/d/1LEmH0Tjv3Vm0aigJLQiCax3NjmC_sbWJ/view?usp=drivesdk


System Drawings

Drive Folder

Embedded Google Drive Folder
limit100
sortname
urlhttps://drive.google.com/drive/folders/1JJbGBuehIlCHmlXD_3EFS3V0SMv7NDNk


Related Documents

Content by Label
cqllabel in ("kla-asiq","kla-asiq-profilometer-characterization","kla-asiq-profilometer-cleanroom","alphastep")