Zygo Optical Profilometer

Overview

System Features


	Non-contact, non-destructive white light optical profilometer, for 3-D surface metrology and topography measurements
Uses and Applications	Surface roughness measurement
	film thickness measurement
	generate 3D surface topography
	From the surface profile, PV, RMS, RA, and size are measured
Measuring Range	Vertical scan range 150 micron bipolar scan 1 mm extend scan (low resolution).
	Field of view 1.8 x1.3 mm with 10x objective and 0.4x zoom 70 x 50 micron with 50x objective and 2x zoom
objective lense	10x and 50 x
zoom factor	0.4-2 x zoom
Software	Metro Pro 8.3.5

LMACS Name	Zygo Optical Profilometer
Confluence Label	Zygo-NV5000
Process Area	Characterization
Model	NV5000 5032
Vendor	Zygo Corporation
Team	Nastaran Yousefi Devin Fortier
Location	CME-L2-128

SOP
Hazard Assessment	Zygo Optical Profilometer HA