Overview

Leica ACE 600 coater is an easy-to-operate high vacuum film deposition system designed to deposit thin conductive films for high resolution SEM and TEM microscopy applications. The tool is configured with (1) a sputtering source for metal film, (2) an evaporation source for carbon coating, as well as (3) glow discharge for surface hydrophilization. An automatic tilting/rotating stage ensures uniform coating over samples with various sizes and geometry. 

LMACS Name

Leica ACE600 Carbon/Metal coater

Confluence Labelleica-em-ace600
Process Area

Characterization

ModelEM ACE600
VendorLeica Microsystems
Team

Peng Li Devin Fortier  Nastaran Yousefi 

Location

CME-L2-120





System Features

Sample HandlingSEM stub mounted


Coating MethodSputtered Au/Pd filmCarbon thread evaporation produces thin amorphous (grain-less) carbon filmGlow discharge for SEM substrate and TEM supporting film hydrophilic applications
Gas SpeciesArgon


Documents

Operating Procedure

ex: Leica EM ACE600 

Hazard AssessmentLeica EM ACE600 HA

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