| Product | Tetraethyl Orthosilicate (TEOS) |
|---|---|
| Manufacturer | Versum Materials |
| Composition | |
| Synonyms | TEOS, Tetraethoxysilane, Ethyl Silicate, Tetraethyl Silicate |
| Typical Uses | PECVD |
| Hazards |
|
| Storage | Stored in gas cabinets within the Trion PECVD system. |
| Disposal | Container and residual material is returned to the vendor. |
| Comments | |
| Status | STOCKED RESTRICTED USE |
Check First
Please contact a nanoFAB staff member for uses not listed above.