| Product | Tin Oxide/Indium Tin Oxide Etchant TE-100 |
|---|---|
| Manufacturer | Transene Company, Inc. |
| Composition | 25–35% ferric chloride, 3–4% hydrochloric acid, >60% water; liquid |
| Synonyms | tin etch, ITO etch |
| Typical Uses | Wet etch for tin, tin oxide, and indium tin oxide |
| Hazards |
Corrosive to metals Category 1
,
Serious eye damage/eye irritation Category 1
,
Skin corrosion/irritation Category 1B
, Acute toxicity (inhalation) Category 2,
Specific target organ toxicity – single exposure Category 2
,
Specific target organ toxicity – repeated exposure Category 2
, Acute toxicity (oral) Category 4 |
| Storage | Cabinet 9 (metal etchants cabinet in Wet Aisle 1) |
| Disposal | Must be collected for disposal; use dedicated "ITO Etchant TE-100 waste" bottle. Waste bottle to be stored in Cabinet 9 until full or no longer in use, after which it should be placed in the chemical pass-through for disposal. |
| Comments | May be used in Wet Process - Metal Etch - Wet Deck 1A/1B. |
| Status |
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Please contact a nanoFAB staff member for uses not listed above.