| Product | Trifluoromethane (CHF3) Halocarbon 23 |
|---|---|
| Manufacturer | Praxair |
| Composition | 100% Halocarbon 23 |
| Typical Uses | etch systems |
| Hazards | |
| Storage | |
| Disposal | |
| Comments | |
| Status | STOCKED RESTRICTED USE |
Check First
Please contact a nanoFAB staff member for uses not listed above.