| Product | Silane |
|---|---|
| Manufacturer | Praxair |
| Composition | SiH₄ |
| Synonyms | Monosilane, silicon hydride, silicon tetrahydride, silicane |
| Typical Uses | LPCVD, PECVD |
| Hazards |
|
| Storage | To be stored in accordance with NFPA 55 / CGA G13 |
| Disposal | Only available for use in contained systems with appropriate abatement |
| Comments | Pyrophoric |
| Status | STOCKED RESTRICTED USE |
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Please contact a nanoFAB staff member for uses not listed above.