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Applicable EquipmentSUSS MABA6
Synonyms
Process AreaLithography
File DownloadSUSS MABA6 Chuck Diagram (gds)

This is a helper file that you can download and use to overlay in your GDSII pattern design to check alignment to the system chuck components.

The primary cells of interest in the GDSII file are:

  • TOP_100mm_MA_chuck – diagram showing position of 100 mm wafer, alignment pins, and BSA windows for mask aligner (MA) chuck
  • TOP_150mm_MA_chuck – diagram showing position of 150 mm wafer, alignment pins, and BSA windows for mask aligner (MA) chuck
  • TOP_100mm_BA_chuck – diagram showing position of 100 mm wafer and BSA windows for bond aligner (BA) chuck
  • TOP_all_100mm_chucks – overlay of TOP_100mm_MA_chuck and TOP_100mm_BA_chuck, useful to see the positions common to the BA and MA chuck BSA windows
  • TOP_all_chucks – overlay of TOP_100mm_MA_chuck, TOP_100mm_BA_chuck, and TOP_150mm_MA_chuckuseful to see the positions common to all BSA windows